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Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions

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DCH-Employees-701
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DCH-Employees-701
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The parameters in the GLMDET-command can be as follows:
The parameters in the GLMDET-command can be as follows:


[[File:GLMDET.jpg|400px]]
[[File:GLMDET.jpg|600px]]


And the parameters in the CHIPAL-command can be as follows:
And the parameters in the CHIPAL-command can be as follows:


[[File:CHIPAL.jpg|400px]]
[[File:CHIPAL.jpg|600px]]
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