Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions
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The jdf-file 'simple.jdf' could look like this: | The jdf-file 'simple.jdf' could look like this: | ||
<pre> | |||
___________________________________________________________________________ | ___________________________________________________________________________ | ||
JOB/W 'SIMPLE',4 4" wafer, jobname is 'SIMPLE', max. 20 capital letters | JOB/W 'SIMPLE',4 4" wafer, jobname is 'SIMPLE', max. 20 capital letters | ||
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___________________________________________________________________________ | ___________________________________________________________________________ | ||
</pre> | |||
Note 1: 9 chips are written, the upper left chip has center in (X,Y) = (0,0). The pitch between the chips is 2 mm in x-direction and 3 mm in y-direction. | Note 1: 9 chips are written, the upper left chip has center in (X,Y) = (0,0). The pitch between the chips is 2 mm in x-direction and 3 mm in y-direction. | ||
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___________________________________________________________________________ | ___________________________________________________________________________ | ||
=== Examples === | === Examples === | ||