Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions

@@ Line 123: / Line 123: @@
 ! 2 wafers with separate jdf files
 |-
-|  colspan="2"
+!colspan="2"| Two 2” wafers are loaded in position 2A and 2B with separate JDF-files ('thomasjfeb242010’ and ‘jonaspfeb242010’ respectively). The 2" cassette is located in slot
+no. 3 in the autoloader. After exposure, the cassette will be unloaded and stage left empty.
+|-
-Two 2” wafers are loaded in position 2A and 2B with separate JDF-files
+|-
+|
-('thomasjfeb242010’ and ‘jonaspfeb242010’ respectively). The 2" cassette is located in slot
+MAGAZIN 'PLAIN'
-no. 3 in the autoloader. After exposure, the cassette will be unloaded to slot no. 3 again.
-MAGAZIN 'PLAIN'
-|
 ;---------------------------
@@ Line 186: / Line 184: @@
 END
+|-
+|-
 |
+|-
 |}