Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions
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! 2 wafers with separate jdf files | ! 2 wafers with separate jdf files | ||
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Two 2” wafers are loaded in position 2A and 2B with separate JDF-files | Two 2” wafers are loaded in position 2A and 2B with separate JDF-files | ||
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MAGAZIN 'PLAIN' | MAGAZIN 'PLAIN' | ||
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;--------------------------- | ;--------------------------- | ||
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END | END | ||
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