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Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions

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! 2 wafers with separate jdf files
! 2 wafers with separate jdf files
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|-
| MAGAZIN 'PLAIN'
|  
 
Two 2” wafers are loaded in position 2A and 2B with separate JDF-files
 
('thomasjfeb242010’ and ‘jonaspfeb242010’ respectively). The 2" cassette is located in slot
 
no. 3 in the autoloader. After exposure, the cassette will be unloaded to slot no. 3 again.
 
MAGAZIN 'PLAIN'


   
   
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