Specific Process Knowledge/Wafer cleaning/7-up & Piranha: Difference between revisions
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Both 7-up and Piranha removes heavy organics. | Both 7-up and Piranha removes heavy organics. | ||
Always use one of these after KOH to remove alkali ions before further processing. 7-up and Piranha are also used as cleaning solutions after stripping resist. | Always use one of these after KOH to remove alkali ions before further processing. 7-up and Piranha are also used as cleaning solutions after stripping resist. | ||
===Comparing data for 7-up and Piranha=== | |||
[[Image:7-up_RR3.jpg|300x300px|right|thumb|7-up in cleanroom 3]] | |||
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[[Image:7-up_RR4.JPG|300x300px|right|thumb|7-up in cleanroom | [[Image:7-up_RR4.JPG|300x300px|right|thumb|7-up in cleanroom 4]] | ||