Specific Process Knowledge/Wafer cleaning/7-up & Piranha: Difference between revisions
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|'''Chemical solution''' | |'''Chemical solution''' | ||
|98% Sulfuricacid and Ammoniumsulfat | |98% Sulfuricacid and Ammoniumsulfat | ||
|98% Sulfuricacid and Hydrogenperoxide 4:1 | |98% Sulfuricacid and Hydrogenperoxide 4:1 add H<math>_2</math>O<math>_2</math> to H<math>_2</math>SO<math>_4</math> | ||
|- | |- | ||
|'''Process temperature''' | |'''Process temperature''' | ||
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10 min. | 10 min. | ||
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|'''Allowed materials''' | |||
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Dependent on which bath is used, look at the text in the pictures. | |||
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All materials (in beaker). | |||
|- | |- | ||
|'''Batch size''' | |'''Batch size''' | ||