Specific Process Knowledge/Etch/DRIE-Pegasus/nanobosch/nanobosch6: Difference between revisions
| Line 1: | Line 1: | ||
<!-- Ok, jmli 20170627 --> | |||
== Test run using AZ resist 24/9-2012 == | == Test run using AZ resist 24/9-2012 == | ||
<!-- revised 1/6-2015 by jmli --> | <!-- revised 1/6-2015 by jmli --> | ||