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Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma UV processing: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
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*'''(0001) HMDS Standard'''
*'''(0001) HMDS Standard'''
VPO temperature: 120°C <br>
VPO temperature: 120°C <br>
Process parameters: 30s vacuum bake @ -0.67 bar, HMDS injection, 90s reaction @ -0.28 bar, 20s cooling @ 21°C.
Process parameters: 30s vacuum bake @ -0.67 bar, HMDS injection, 180s reaction @ -0.28 bar, 20s cooling @ 21°C.


Test results:
Test results:
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