Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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|style="background:WhiteSmoke; color:black" align="center"|[[/Zeiss|SEM Zeiss]] | |style="background:WhiteSmoke; color:black" align="center"|[[/Zeiss|SEM Zeiss]] | ||
|style="background:WhiteSmoke; color:black" align="center"|[[/Supra60VP|SEM Supra 60VP]] | |style="background:WhiteSmoke; color:black" align="center"|[[/Supra60VP|SEM Supra 60VP]] | ||
|style="background:WhiteSmoke; color:black" align="center"|[[/Jeol|SEM Jeol]] | |||
|style="background:WhiteSmoke; color:black" align="center"|[[/Jeol|SEM Jeol]] | |style="background:WhiteSmoke; color:black" align="center"|[[/Jeol|SEM Jeol]] | ||
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|style="background:WhiteSmoke; color:black" align="center"| Zeiss Supra 60 VP | |style="background:WhiteSmoke; color:black" align="center"| Zeiss Supra 60 VP | ||
|style="background:WhiteSmoke; color:black" align="center"| Jeol JSM 5500 LV | |style="background:WhiteSmoke; color:black" align="center"| Jeol JSM 5500 LV | ||
|style="background:WhiteSmoke; color:black" align="center"| FEI Quanta 200 3D | |||
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!style="background:silver; color:black;" align="center" width="60"|Purpose | !style="background:silver; color:black;" align="center" width="60"|Purpose | ||
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* Samples from the 'real' world outside the lab | * Samples from the 'real' world outside the lab | ||
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* Conductive samples | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance | ||
|style="background:LightGrey; color:black" rowspan="2"|Resolution | |style="background:LightGrey; color:black" rowspan="2"|Resolution | ||
|style="background:Whitesmoke; color:black" colspan=" | |style="background:Whitesmoke; color:black" colspan="5" align="center"| The resolution of a SEM is strongly dependent on the type of sample and the skills of the operator. The highest resolution is probably only achieved on special samples | ||
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* 20 nm (limited by instrument) | * 20 nm (limited by instrument) | ||
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* ~3.5 nm (limited by instrument) | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="5"|Instrument specifics | !style="background:silver; color:black" align="center" valign="center" rowspan="5"|Instrument specifics | ||
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* Secondary electron (SEI) | * Secondary electron (SEI) | ||
* Backscatter electron (BEI) | * Backscatter electron (BEI) | ||
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* Secondary electron (Everhart-Thornley (ETD)) | |||
* Backscatter electron (BSD) - Add-on | |||
* Large Field Detector (LFD) - Add-on | |||
* CCD camera | |||
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|style="background:LightGrey; color:black"|Stage | |style="background:LightGrey; color:black"|Stage | ||
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* R: 360<sup>o</sup> | * R: 360<sup>o</sup> | ||
* Z: 38 mm | * Z: 38 mm | ||
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* X, Y: 25 × 25 mm | |||
* T: 0 to 60<sup>o</sup> | |||
* R: 360<sup>o</sup> | |||
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|style="background:LightGrey; color:black"|Electron source | |style="background:LightGrey; color:black"|Electron source | ||
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* FEG (Field Emission Gun) source | * FEG (Field Emission Gun) source | ||
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* Tungsten filament | |||
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* Tungsten filament | * Tungsten filament | ||
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* Fixed at High vacuum | * Fixed at High vacuum | ||
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* High vacuum and Low vacuum | |||
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|style="background:LightGrey; color:black"|Options | |style="background:LightGrey; color:black"|Options | ||
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* Oxford Instruments X-Max<sup>N</sup> 50 mm<sup>2</sup> SDD EDX detector and AZtec software package | * Oxford Instruments X-Max<sup>N</sup> 50 mm<sup>2</sup> SDD EDX detector and AZtec software package | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
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* Focused ion beam (FIB) (Ga<sup>+</sup> ions) | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | ||
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* Up to 4" wafer | * Up to 4" wafer | ||
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* Wafers won´t fit without a proper holder. The height of the sample is critical, should be as small, as possible | |||
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| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||
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* Any standard cleanroom material including graphene or CNT samples | * Any standard cleanroom material including graphene or CNT samples | ||
* Biological samples | * Biological samples | ||
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* Conductive materials | |||
* No biological samples | |||
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