Specific Process Knowledge/Etch/ICP Metal Etcher/Aluminium: Difference between revisions
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! Pressure (mTorr) | ! Pressure (mTorr) | ||
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Bghe (talk | contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators 7,317 edits No edit summary |
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| Line 34: | Line 34: | ||
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! Pressure (mTorr) | ! Pressure (mTorr) | ||
| 2, Strike 3 | | 2, Strike 3 sec@5 mTorr | ||
| 1 | | 1 | ||
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