Specific Process Knowledge/Etch/Etching of Titanium: Difference between revisions
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# BHF | # BHF | ||
# Cold RCA1 | # Cold RCA1 | ||
Do it by making your own set up in a beaker in a fume hood - preferably in cleanroom 2 or 4. BHF etching can also take place in the PP-etch bath in the fume hood in cleanroom 2. | Do it by making your own set up in a beaker in a fume hood - preferably in cleanroom 2 or 4. BHF etching can also take place in the PP-etch bath in the fume hood in cleanroom 2. | ||
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Etch of titanium with or without photoresist mask. | Etch of titanium with or without photoresist mask. | ||
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Etch of titanium (as stripper) | Etch of titanium (as stripper or with eagle resist). | ||
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|'''Chemical solution''' | |'''Chemical solution''' | ||