Specific Process Knowledge/Thin film deposition/Lesker: Difference between revisions
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|style="background:LightGrey; color:black"|Process Temperature | |style="background:LightGrey; color:black"|Process Temperature | ||
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* | * usually room temp | ||
* Sample can be heated to more than 400°C | |||
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|style="background:LightGrey; color:black"|Process pressure | |style="background:LightGrey; color:black"|Process pressure | ||