Specific Process Knowledge/Imprinting: Difference between revisions
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*Speedline Manual Spinner - ''For spinning of PMMA and Topas'' | *Speedline Manual Spinner - ''For spinning of PMMA and Topas'' | ||
*EVG NIL - ''Aligner and imprinting tool'' | *EVG NIL - ''Aligner and imprinting tool'' | ||
Revision as of 10:13, 4 January 2008
Choose an equipment
- MVD - Molecular Vapor Deposition - Antistiction coater for silicon stamps
- Drop Shape Analyzer - Tool to measure the hydrophobicity of the antistiction layer
- Speedline Manual Spinner - For spinning of PMMA and Topas
- EVG NIL - Aligner and imprinting tool