Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma UV processing: Difference between revisions
Appearance
| Line 372: | Line 372: | ||
|Silicon with native oxide | |Silicon with native oxide | ||
|2.201 | |2.201 | ||
|0. | |0.5% | ||
|20/3 2015 | |20/3 2015 | ||
|taran | |taran | ||