Specific Process Knowledge/Etch/ICP Metal Etcher/Barc Etch: Difference between revisions

Revision as of 13:11, 22 May 2015

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Barc Etch

Etching barc with a dedicated recipe for barc etching is a good idea if you are on the limit of having enough DUV resist mask to reach etch depth you need.Here is an example of a barc etch I have started testing.

Parameter	Barc etch with CF4	Barc etch with O2
Coil power	800W	150w
Platen power	100W	15W
Pressure	3 mTorr	5mTorr
Flow rate CF4	4 sccm
Flow rate H2	20sccm
Flow rate O2		20sccm

Parameter	Results with 'Barc etch with CF'	Results with 'Barc etch with O2'
Etch rate in barc	52 nm in 30s [bghe 20150519]	62 nm in 50s [bghe 20150521]
Etch rate in KRF resist	27 nm in 30s [bghe 20150519]	73 nm in 50s [bghe 20150521]
Selectivity KRF:Barc	1:2	1:0.8
Etch 65nm barc	Use 40-45s	Use 55-60s

@@ Line 8: / Line 8: @@
 ! Parameter
 ! Barc etch with CF4
+! Barc etch with O2
 |-
-|Coil power||800W
+|Coil power||800W||150w
 |-
-|Platen power||100W
+|Platen power||100W||15W
 |-
-|Pressure||3 mTorr
+|Pressure||3 mTorr||5mTorr
 |-
-|Flow rate CF4||4 sccm
+|Flow rate CF4||4 sccm||
 |-
-|Flow rate H2||20sccm
+|Flow rate H2||20sccm||
+|-
+|Flow rate O2||||20sccm
 |-
 |}
@@ Line 24: / Line 26: @@
 {| border="1" cellspacing="1" cellpadding="2"  align="left"
 ! Parameter
-! Results
+! Results with 'Barc etch with CF'
+! Results with 'Barc etch with O2'
 |-
-|Etch rate in barc||'''52 nm in 30s''' ''[bghe 20150519]''
+|Etch rate in barc||'''52 nm in 30s''' ''[bghe 20150519]''||'''62 nm in 50s''' ''[bghe 20150521]''
 |-
-|Etch rate in KRF resist||'''27 nm in 30s''' ''[bghe 20150519]''
+|Etch rate in KRF resist||'''27 nm in 30s''' ''[bghe 20150519]''||'''73 nm in 50s''' ''[bghe 20150521]''
 |-
-|Selectivity KRF:Barc||'''1:2'''
+|Selectivity KRF:Barc||'''1:2''' ||'''1:0.8'''
 |-
-|Etch 65nm barc||'''Use 40-45s'''
+|Etch 65nm barc||'''Use 40-45s'''||'''Use 55-60s'''
 |-
 |}
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