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Specific Process Knowledge/Etch/ICP Metal Etcher/Barc Etch: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
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Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,304 edits
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! Results
! Results
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|Etch rate in barc||'''52nm in 30s''' ''[bghe 20150519]''
|Etch rate in barc||'''52 nm in 30s''' ''[bghe 20150519]''
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|Etch rate in KRF resist||'''27 nm in 30s''' ''[bghe 20150519]''
|Etch rate in KRF resist||'''27 nm in 30s''' ''[bghe 20150519]''
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