Specific Process Knowledge/Etch/ICP Metal Etcher/Barc Etch: Difference between revisions
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! Results | ! Results | ||
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|Etch rate in barc||52nm in 30s | |Etch rate in barc||52nm in 30s [bghe 20150519] | ||
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|Etch rate in KRF resist||27 nm in 30s | |Etch rate in KRF resist||27 nm in 30s [bghe 20150519] | ||
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|Selectivity KRF:Barc||1:2 | |Selectivity KRF:Barc||1:2 | ||
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|Etch 65nm barc||Use 40-45s | |Etch 65nm barc||Use 40-45s | ||