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Specific Process Knowledge/Etch/ICP Metal Etcher/Barc Etch: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
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Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,317 edits
Line 7: Line 7:
{| border="1" cellspacing="1" cellpadding="2"  align="left"
{| border="1" cellspacing="1" cellpadding="2"  align="left"
! Parameter
! Parameter
! Settings
! Barc etch with CF4
|-  
|-  
|Coil power||800W
|Coil power||800W
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