Specific Process Knowledge/Etch/ICP Metal Etcher/Barc Etch: Difference between revisions
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Etching barc with a dedicated recipe for barc etching is a good idea if you are on the limit of having enough DUV resist mask to reach etch depth you need.Here is an example of a barc etch I have started testing. | Etching barc with a dedicated recipe for barc etching is a good idea if you are on the limit of having enough DUV resist mask to reach etch depth you need.Here is an example of a barc etch I have started testing. | ||
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! Parameter | |||
! Settings | |||
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|Coil power||800W | |||
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|Platen power||100W | |||
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|Pressure||3 mTorr | |||
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|Flow rate CF4||4 sccm | |||
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|Flow rate H2||20sccm | |||
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! Parameter | |||
! Results | |||
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|Etch rate in barc||52nm in 30s | |||
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|Etch rate in KRF resist||27 nm in 30s | |||
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|Selectivity KRF:Barc||1:2 | |||
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|Etch 65nm barc||Use 40-45s | |||
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