Specific Process Knowledge/Etch/ICP Metal Etcher/Barc Etch: Difference between revisions
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==Barc Etch== | ==Barc Etch== | ||
Etching barc with a dedicated recipe for barc etching is a good idea if you are on the limit of having enough DUV resist mask to reach | Etching barc with a dedicated recipe for barc etching is a good idea if you are on the limit of having enough DUV resist mask to reach etch depth you need.Here is an example of a barc etch I have started testing. | ||
Revision as of 12:10, 19 May 2015
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Barc Etch
Etching barc with a dedicated recipe for barc etching is a good idea if you are on the limit of having enough DUV resist mask to reach etch depth you need.Here is an example of a barc etch I have started testing.