Specific Process Knowledge/Characterization/Sample preparation: Difference between revisions
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![[image:AFM-PDMS_BOTH_4.jpg|300x300px|thumb|left| | ![[image:AFM-PDMS_BOTH_4.jpg|300x300px|thumb|left| | ||
Concept of AFM profiling. (a) 3D view of one of the | Concept of AFM profiling. (a) 3D view of one of the feature and axis assignment. (b) Front view of one of the casted feature with approached AFM tip. The AFM tip and the PDMS feature are to the same scale. The geometry of an inverted KOH etched silicon V-groove is superposed and indicated by the dotted red lines. | ||
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