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Specific Process Knowledge/Characterization/Sample preparation: Difference between revisions

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DCH-Employees-701, danchip
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![[image:AFM-PDMS_BOTH_4.jpg|600x600px|thumb|left|
![[image:AFM-PDMS_BOTH_4.jpg|300x300px|thumb|left|
  Bird View. Dark area is Silicon. Bright area is Silicon Dioxide. The edges are nicely defined, though corrugated on the 100 nm scale.
  Concept of AFM profiling. (a) 3D view of one of the casted lens cross sections and axis assignment. (b) Front view of one of the casted lens cross sections with approached AFM tip. The AFM tip and the PDMS feature are to the same scale. The geometry of an inverted KOH etched silicon V-groove is superposed and indicated by the dotted red lines.
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