Specific Process Knowledge/Characterization/Sample preparation: Difference between revisions
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=Sample | =Replica Molding for Sample Inspection= | ||
''by Frederik Stöhr @danchip'' | ''by Frederik Stöhr @danchip'' | ||
== | ==Introduction== | ||
Negative replicas of micro- or nanostructures can be obtained by casting with PDMS. This can facilitate the characterization of the three dimensional shape, the texture, or the roughness of a given sample. It may circumvent the inabilities of probes (AFM tip, stylus) to approach a surface of e.g. a deep and narrow cavity. It may also circumvent limitations of the optical profiler regarding the maximum detectable slope or the sensitivity of the CCD when measuring strongly tapered or deep cavities. PDMS is a common material in microfabrication and has unique properties that allow replicating features in the single nanometer range [1]. | Negative replicas of micro- or nanostructures can be obtained by casting with PDMS. This can facilitate the characterization of the three dimensional shape, the texture, or the roughness of a given sample. It may circumvent the inabilities of probes (AFM tip, stylus) to approach a surface of e.g. a deep and narrow cavity. It may also circumvent limitations of the optical profiler regarding the maximum detectable slope or the sensitivity of the CCD when measuring strongly tapered or deep cavities. PDMS is a common material in microfabrication and has unique properties that allow replicating features in the single nanometer range [1]. | ||