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Specific Process Knowledge/Characterization/Sample preparation: Difference between revisions

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==Example: Replica Molding of cross sections of DRIE etched cavities==
==Example: Replica Molding of cross sections of DRIE etched cavities==


==Etching of 1.1 µm SiO2 by 10 min m_res_ny: Corrugated sidewall==
''by Frederik Stöhr @danchip''
''by Frederik Stöhr @danchip''