Specific Process Knowledge/Characterization/Sample preparation: Difference between revisions
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Negative replicas of micro- or nanostructures can be obtained by casting with PDMS. This can facilitate the characterization of the three dimensional shape, the texture, or the roughness of a given sample. It may circumvent the inabilities of probes (AFM tip, stylus) to approach a surface of e.g. a deep and narrow cavity. It may also circumvent limitations of the optical profiler regarding the maximum detectable slope or the sensitivity of the CCD when measuring strongly tapered or deep cavities. PDMS is a common material in microfabrication and has unique properties that allow replicating features in the single nanometer range [1]. | Negative replicas of micro- or nanostructures can be obtained by casting with PDMS. This can facilitate the characterization of the three dimensional shape, the texture, or the roughness of a given sample. It may circumvent the inabilities of probes (AFM tip, stylus) to approach a surface of e.g. a deep and narrow cavity. It may also circumvent limitations of the optical profiler regarding the maximum detectable slope or the sensitivity of the CCD when measuring strongly tapered or deep cavities. PDMS is a common material in microfabrication and has unique properties that allow replicating features in the single nanometer range [1]. | ||
* A simplified list of necessary steps is given below. Please follow the safety and working rules of the individual lab the work is done in and consider the safety instructions given in [2]. | * A simplified list of necessary steps is given below. | ||
* Please follow the safety and working rules of the individual lab the work is done in and consider the safety instructions given in [2]. | |||
* There is a dedicated lab for work with PDMS at DTU Nanotech. | |||
* Please be aware that it is not allowed to work with PDMS in its uncured state inside the cleanroom. The list of approved chemicals inside the cleanroom still holds. | * Please be aware that it is not allowed to work with PDMS in its uncured state inside the cleanroom. The list of approved chemicals inside the cleanroom still holds. | ||
* Details on Danchip’s experience with PDMS as a casting material may be found in [3] (please cite!). A detailed description for PDMS casting can be found in [2] and practical information is given in [4]. | * Details on Danchip’s experience with PDMS as a casting material may be found in [3] (please cite!). A detailed description for PDMS casting can be found in [2] and practical information is given in [4]. | ||