Specific Process Knowledge/Wafer cleaning/7-up & Piranha: Difference between revisions
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Cleaning of wafers or masks using the dedicated tanks. There are one tank for masks and one for 4-6" wafers in cleanroom 4 and one tank in cleanroom 3 for 4" wafers only. | Cleaning of wafers or masks using the dedicated tanks. There are one tank for masks and pyrexwafers and one for 4-6" Si wafers in cleanroom 4 and one tank in cleanroom 3 for 4" wafers only. | ||
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Cleaning of wafers using a beaker in the fumehood in cleanroom 2.Used for glass wafers or wafers with metal or other materials that you are not allowed to put in the 7-up for wafers. | Cleaning of wafers using a beaker in the fumehood in cleanroom 2.Used for glass wafers or wafers with metal or other materials that you are not allowed to put in the 7-up for wafers. | ||