Specific Process Knowledge/Characterization/Sample preparation: Difference between revisions

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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Sample_preparation click here]'''
=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=




==An overview of the performance of the AFM: Nanoman==
==A simplified list of necessary steps==


{| border="2" cellspacing="0" cellpadding="2"  
{| border="2" cellspacing="0" cellpadding="2"  


!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment
!colspan="1" border="none" style="background:silver; color:black;" align="center"|Step
|style="background:WhiteSmoke; color:black"|<b>Nanoman</b>
|style="background:WhiteSmoke; color:black"|<b>Task</b>
|style="background:WhiteSmoke; color:black"|<b>Aim</b>
|style="background:WhiteSmoke; color:black"|<b>Methods</b>
|-
|-
!style="background:silver; color:black;" align="left"|Purpose
!style="background:silver; color:black;" align="left"|1
|style="background:LightGrey; color:black"|Topografic measurement in the nanometer and and sub-micrometer regime
|style="background:LightGrey; color:black"|Sample preparation
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|A mold containing the sample that is sufficiently sealed to allow holding the viscous polymer.
*Surface roughness measurement
|style="background:WhiteSmoke; color:black"|Some parts from the mechanical workshop, etc. Do not forget poper cleaning.
*Step/structure hight measurement
*Surface image
|-
|-
!style="background:silver; color:black" align="left"|Performance
!style="background:silver; color:black;" align="left"|2
|style="background:LightGrey; color:black"|Scan range xy
|style="background:LightGrey; color:black"|Anti-stiction coating
|style="background:WhiteSmoke; color:black"|Up to 90 µm square
|style="background:WhiteSmoke; color:black"|A sample to which PDMS does not adhere upon casting.
|style="background:WhiteSmoke; color:black"|E.g. MVD -> FDTS layer (comply to cleanroom and machine rules)
|-
|-
|style="background:silver; color:black"|
!style="background:silver; color:black;" align="left"|3
|style="background:LightGrey; color:black"|Scan range z
|style="background:LightGrey; color:black"|Sample preparation
|style="background:WhiteSmoke; color:black"| 1 µm (can go up to 6µm with special settings)
|style="background:WhiteSmoke; color:black"|A mold containing the sample that is sufficiently sealed to allow holding the viscous polymer.
|style="background:WhiteSmoke; color:black"|Some parts from the mechanical workshop, etc. Do not forget poper cleaning.
|-
|-
|style="background:silver; color:black"|
!style="background:silver; color:black;" align="left"|4
|style="background:LightGrey; color:black"|Resolution xy
|style="background:LightGrey; color:black"|Sample preparation
|style="background:WhiteSmoke; color:black"|Down to 1.4 nm - accuracy better than 2%
|style="background:WhiteSmoke; color:black"|A mold containing the sample that is sufficiently sealed to allow holding the viscous polymer.
|style="background:WhiteSmoke; color:black"|Some parts from the mechanical workshop, etc. Do not forget poper cleaning.
|-
|-
|style="background:silver; color:black"|
!style="background:silver; color:black;" align="left"|5
|style="background:LightGrey; color:black"|Resolution z
|style="background:LightGrey; color:black"|Sample preparation
|style="background:WhiteSmoke; color:black"|<1 Å - accuracy better than 2%
|style="background:WhiteSmoke; color:black"|A mold containing the sample that is sufficiently sealed to allow holding the viscous polymer.
|style="background:WhiteSmoke; color:black"|Some parts from the mechanical workshop, etc. Do not forget poper cleaning.
|-
|-
|style="background:silver; color:black"|
!style="background:silver; color:black;" align="left"|6
|style="background:LightGrey; color:black"|Max. scan depth as a function of trench width W
|style="background:LightGrey; color:black"|Sample preparation
|style="background:WhiteSmoke; color:black"|~1 for our standard probe. Can be improved to about 10 with the right probe
|style="background:WhiteSmoke; color:black"|A mold containing the sample that is sufficiently sealed to allow holding the viscous polymer.
|style="background:WhiteSmoke; color:black"|Some parts from the mechanical workshop, etc. Do not forget poper cleaning.
|-
|-
!style="background:silver; color:black" align="left"|Hardware settings
!style="background:silver; color:black;" align="left"|7
|style="background:LightGrey; color:black"|Tip radius of curvature
|style="background:LightGrey; color:black"|Sample preparation
|style="background:WhiteSmoke; color:black"|Standard probe: <12 nm
|style="background:WhiteSmoke; color:black"|A mold containing the sample that is sufficiently sealed to allow holding the viscous polymer.
|style="background:WhiteSmoke; color:black"|Some parts from the mechanical workshop, etc. Do not forget poper cleaning.
|-
|-
|style="background:silver; color:black"|
!style="background:silver; color:black;" align="left"|8
|style="background:LightGrey; color:black"|Standard Cantilevers/tips
|style="background:LightGrey; color:black"|Sample preparation
|style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-Tap300Al-G.html Tap300Al-G]
|style="background:WhiteSmoke; color:black"|A mold containing the sample that is sufficiently sealed to allow holding the viscous polymer.
|style="background:WhiteSmoke; color:black"|Some parts from the mechanical workshop, etc. Do not forget poper cleaning.
|-
|-
|style="background:silver; color:black"|
!style="background:silver; color:black;" align="left"|9
|style="background:LightGrey; color:black"|Super Sharp Si Cantilever/tip
|style="background:LightGrey; color:black"|Sample preparation
|style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-SSS-NCHR.html SSS-NCHR]
|style="background:WhiteSmoke; color:black"|A mold containing the sample that is sufficiently sealed to allow holding the viscous polymer.
|-
|style="background:WhiteSmoke; color:black"|Some parts from the mechanical workshop, etc. Do not forget poper cleaning.
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|High Aspect Ratio Cantilever/tip
|style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-AR5-NCHR.html AR5-NCHR]
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|Cantilevers/tips vendor
|style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/home.php www.nanoandmore.com]
|-
|-
!style="background:silver; color:black" align="left"|Substrates
|style="background:LightGrey; color:black"|Substrate size
|style="background:WhiteSmoke; color:black"|Up to 6"
|-
|style="background:silver; color:black"|
| style="background:LightGrey; color:black"|Substrate material allowed
|style="background:WhiteSmoke; color:black"|In principle all materials
|-
|-
|}
|}


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Revision as of 17:40, 12 May 2015

THIS PAGE IS UNDER CONSTRUCTION

A simplified list of necessary steps

Step Task Aim Methods
1 Sample preparation A mold containing the sample that is sufficiently sealed to allow holding the viscous polymer. Some parts from the mechanical workshop, etc. Do not forget poper cleaning.
2 Anti-stiction coating A sample to which PDMS does not adhere upon casting. E.g. MVD -> FDTS layer (comply to cleanroom and machine rules)
3 Sample preparation A mold containing the sample that is sufficiently sealed to allow holding the viscous polymer. Some parts from the mechanical workshop, etc. Do not forget poper cleaning.
4 Sample preparation A mold containing the sample that is sufficiently sealed to allow holding the viscous polymer. Some parts from the mechanical workshop, etc. Do not forget poper cleaning.
5 Sample preparation A mold containing the sample that is sufficiently sealed to allow holding the viscous polymer. Some parts from the mechanical workshop, etc. Do not forget poper cleaning.
6 Sample preparation A mold containing the sample that is sufficiently sealed to allow holding the viscous polymer. Some parts from the mechanical workshop, etc. Do not forget poper cleaning.
7 Sample preparation A mold containing the sample that is sufficiently sealed to allow holding the viscous polymer. Some parts from the mechanical workshop, etc. Do not forget poper cleaning.
8 Sample preparation A mold containing the sample that is sufficiently sealed to allow holding the viscous polymer. Some parts from the mechanical workshop, etc. Do not forget poper cleaning.
9 Sample preparation A mold containing the sample that is sufficiently sealed to allow holding the viscous polymer. Some parts from the mechanical workshop, etc. Do not forget poper cleaning.


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