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Specific Process Knowledge/Thin Film deposition/ALD/TiO2 deposition using ALD: Difference between revisions

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Below some SEM images of anatase TiO<sub>2</sub> deposited on trenches are shown.
Below some SEM images of anatase TiO<sub>2</sub> deposited at 120 <sup>o</sup>C on Si trenches are shown. The width of the trenches is 200 nm, and the depth is 4 \mum, i.e. the aspect ratio is 1:20. The number of cycles is 500, and this results in a TiO<sub>2</sub> layer of about 25 nm. From the SEM images it is seen that the TiO<sub>2</sub> layer covers the trenches very well.  


<gallery caption="Anatase TiO<sub>2</sub> deposited on a Si sample with trenches. Temperature = 120 <sup>o</sup>C, number of cycles = 500. Trench width = 200 nm, trench depth = 4 \mum, i.e. the aspect ratio is 1:20. It is seen that the TiO<sub>2</sub> covrets the trenches very well" widths="350px" heights="350px" perrow="5">
<gallery caption="" widths="250px" heights="250px" perrow="5">
image:SEM-TiO2-120C-1.jpg|
image:SEM-TiO2-120C-1.jpg|
image:SEM-TiO2-120C-2.jpg|
image:SEM-TiO2-120C-2.jpg|
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Below some SEM images of amorphous TiO<sub>2</sub> deposited on trenches are shown
Below some SEM images of anatase TiO<sub>2</sub> deposited at 300 <sup>o</sup>C on Si trenches are shown. The width of the trenches is 200 nm, and the depth is 4 \mum, i.e. the aspect ratio is 1:20. The number of cycles is 500, and this results in a TiO<sub>2</sub> layer of about 26 nm. From the SEM images it is seen that the TiO<sub>2</sub> layer covers the trenches very well.


<gallery caption="Amorphous TiO<sub>2</sub> deposited a Si sample with trenches. Temperature = 300 <sup>o</sup>C, number of cycles = 500. Trench width = 200 nm, trench depth = 4 \mum, i.e. the aspect ratio is 1:20. It is seen that the TiO<sub>2</sub> covrets the trenches very well" widths="350px" heights="350px" perrow="5">
<gallery caption="" widths="250px" heights="250px" perrow="5">
image:TiO2 trenches-300C-1.jpg|
image:TiO2 trenches-300C-1.jpg|
image:TiO2 trenches-300C-2.jpg|
image:TiO2 trenches-300C-2.jpg|
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