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Specific Process Knowledge/Lithography/Coaters: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,528 edits
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|style="background:WhiteSmoke; color:black"|
*HMDS priming
*HMDS priming
*Spin coating of PGMEA based AZ resists
*Spin coating of PGMEA based UV resists
*Spin coating of E-beam resists <sup>1)</sup>
*Spin coating of E-beam resists <sup>1)</sup>
*Soft baking  
*Soft baking  
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