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| In the graphs below the Al<sub>2</sub>O<sub>3</sub> thickness as function of number of cycles for deposition temperatures between 150 <sup>o</sup>C and 350 <sup>o</sup>C can be seen. From the equations the number of cycles required for a certain thickess can be calculated.
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| <gallery caption="Aluminium oxide thickness as function of number of cycles" widths="220px" heights="220px" perrow="5">
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| image:ALD_TiO2_grow_rate_150C.jpg| Temperature 150 <sup>o</sup>C.
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| image:ALD Al2O3 grow rate 200C.jpg| Temperature 200 <sup>o</sup>C.
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| image:ALD Al2O3 grow rate 250C.jpg| Temperature 250 <sup>o</sup>C.
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| image:ALD Al2O3 grow rate 200C.jpg| Temperature 300 <sup>o</sup>C.
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| image:ALD Al2O3 grow rate 350C.jpg| Temperature 350 <sup>o</sup>C.
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| </gallery>
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| <gallery caption="Titanium oxide thickness as function of number of cycles" widths="220px" heights="220px" perrow="5"> | | <gallery caption="Titanium oxide thickness as function of number of cycles" widths="220px" heights="220px" perrow="5"> |
| image:ALD TiO2 grow rate 150C.tif| Temperature 150 <sup>o</sup>C. | | image:ALD_TiO2_grow_rate_150C.jpg| Temperature 150 <sup>o</sup>C. |
| image:ALD TiO2 grow rate 250C.tif| Temperature 200 <sup>o</sup>C. | | image:ALD_TiO2_grow_rate_250C.jpg| Temperature 200 <sup>o</sup>C. |
| image:ALD TiO2 grow rate 350C.tif| Temperature 250 <sup>o</sup>C. | | image:ALD_TiO2_grow_rate_350C.jpg| Temperature 250 <sup>o</sup>C. |
| </gallery> | | </gallery> |
