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Specific Process Knowledge/Wafer cleaning/7-up & Piranha: Difference between revisions

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==Etching of Titanium==
==Cleaning of wafers or masks==
Etching of Titanium is done wet at Danchip. We have two solutions for titanium etching:
Cleaning of wafers or masks with sulphuric acid can be done either in a dedicated tank "7-up" or in the fumehood in a beaker "Piranda":
    
    
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