Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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*100 - 5000 rpm | *100 - 5000 rpm | ||
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*10 - 5000 rpm (3000 rpm with | *10 - 5000 rpm (3000 rpm with non-vacuum chuck) | ||
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*10 - 9990 rpm | *10 - 9990 rpm | ||