Specific Process Knowledge/Characterization/Element analysis: Difference between revisions
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|| The size interaction volume depends on the SEM high voltage and sample density: The higher the SEM high voltage the bigger and deeper the interaction volume. The more dense the material is the smaller is the interaction volume. See section 'Spatial resolution' below. | || The size interaction volume depends on the SEM high voltage and sample density: The higher the SEM high voltage the bigger and deeper the interaction volume. The more dense the material is the smaller is the interaction volume. See section 'Spatial resolution using EDX' below. | ||
|| The sputtering of the surface makes it possible to perform detailed depth profiling with extremely good sensitivity and depth resolution. | || The sputtering of the surface makes it possible to perform detailed depth profiling with extremely good sensitivity and depth resolution. | ||
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