Jump to content

Specific Process Knowledge/Characterization/Element analysis: Difference between revisions

← Older editNewer edit →
VisualWikitext
Jml (talk | contribs)
Bureaucrats, danchip, Administrators
1,918 edits
Jml (talk | contribs)
Bureaucrats, danchip, Administrators
1,918 edits
Line 51: Line 51:
|-
|-
!  Depth resolution
!  Depth resolution
|| The size interaction volume depends on the SEM high voltage and sample density: The higher the SEM high voltage the bigger and deeper the interaction volume. The more dense the material is the smaller is the interaction volume.
|| The size interaction volume depends on the SEM high voltage and sample density: The higher the SEM high voltage the bigger and deeper the interaction volume. The more dense the material is the smaller is the interaction volume. See section 'Spatial resolution' below.
|| The sputtering of the surface makes it possible to perform detailed depth profiling with extremely good sensitivity and depth resolution.
|| The sputtering of the surface makes it possible to perform detailed depth profiling with extremely good sensitivity and depth resolution.
|-
|-
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Element_analysis"