Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/Crystal Settings: Difference between revisions
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! | !2014-07-22 | ||
| | |157.3% (wafer center) | ||
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! | !2015-09-08 | ||
| | |132 % | ||
|B2 | |B2 | ||
|B3 | |B3 | ||