Specific Process Knowledge/Etch/Wet Aluminium Etch: Difference between revisions
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~100 nm/min (Pure Al) | ~100 nm/min (Pure Al) | ||
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~60 | ~60 nm/min | ||
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|'''Batch size''' | |'''Batch size''' | ||
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| Line 44: | Line 44: | ||
~100 nm/min (Pure Al) | ~100 nm/min (Pure Al) | ||
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~60 | ~60 nm/min | ||
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|'''Batch size''' | |'''Batch size''' | ||