Specific Process Knowledge/Characterization/XPS: Difference between revisions
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Measurements of the At. % of C on the Au-reference in the XPS after an initial sputter clean were conducted for 16 hours every hour. The results show that carbon is detectable after 1-2 hours and gradually builds up at a rate of approximately 0.6 At. percentage points per hour, i.e. much slower than if the sample is exposed to air. Thus carbon contamination on samples in the XPS typically originates from air exposure. | Measurements of the At. % of C on the Au-reference in the XPS after an initial sputter clean were conducted for 16 hours every hour. The results show that carbon is detectable after 1-2 hours and gradually builds up at a rate of approximately 0.6 At. percentage points per hour, i.e. much slower than if the sample is exposed to air. Thus carbon contamination on samples in the XPS typically originates from air exposure. | ||
[[File:C-contamination.jpg]] | [[File:C-contamination.jpg]] | ||