Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
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===Deal-Grove parameters=== | ===Deal-Grove parameters=== | ||
''By Kasper Reck-Nielsen February 2015'' | |||
The following table contains linear and parabolic parameters for use in the Deal-Grove model for thermal oxidation. The parameters are obtained a least squares fit to data available in the furnace logbooks. Information on wafer orientation and doping concentration, which is not available in the logbooks, has not been included in calculating the parameters. | The following table contains linear and parabolic parameters for use in the Deal-Grove model for thermal oxidation. The parameters are obtained a least squares fit to data available in the furnace logbooks. Information on wafer orientation and doping concentration, which is not available in the logbooks, has not been included in calculating the parameters. | ||