Specific Process Knowledge/Characterization/Sample imaging: Difference between revisions
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The optical microscopes provide fast and easy information about most samples without sample preparation. The resolution is limited by the objectives and wavelenght of the light. Also the depth of focus is limited, especially for higher magnifications. | The optical microscopes provide fast and easy information about most samples without sample preparation. The resolution is limited by the objectives and wavelenght of the light. Also the depth of focus is limited, especially for higher magnifications. | ||
The main purpose of the optical profiler is | The main purpose of the optical profiler is to obtain 3D images of different samples and to measure surface roughtness or step heights, also for structures with high aspect ratio. Two different types of measurements can be done - confocal and interference (phase shift and vertical scanning interference) measurements. It is possible to measurement hight aspect ratio structures. The resolution is limited by the objectives and the pixel size on the screen. | ||
The SEMs are used for inspection of different sample. The resolution is very good - It is possible to obtaion good images of strucures smaller then 100 nm with all SEMs in the cleanroom. Samples can either flat or tilted. | The SEMs are used for inspection of different sample. The resolution is very good - It is possible to obtaion good images of strucures smaller then 100 nm with all SEMs in the cleanroom. Samples can either flat or tilted. | ||