Specific Process Knowledge/Lithography/CSAR: Difference between revisions
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! rowspan="4" align="center"| Recipe | ! rowspan="4" align="center"| Recipe | ||
| Gasses | | Gasses | ||
| C<sub>4</sub>F<sub>8</sub> | | C<sub>4</sub>F<sub>8</sub> 70 sccm, SF<sub>6</sub> 38 sccm | ||
|rowspan="7" width="20%" | Profiles of lines exposed at 300 µC/cm2, etched 60s with recipe 'ProcessC' | |rowspan="7" width="20%" | Profiles of lines exposed at 300 µC/cm2, etched 60s with recipe 'ProcessC' | ||
[[File:tigre 6.17 0% 3b_ 07.png|200px]] [[File:tigre 6.17 0% 3b_ 16.png|200px]] | [[File:tigre 6.17 0% 3b_ 07.png|200px]] [[File:tigre 6.17 0% 3b_ 16.png|200px]] | ||
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|- | |- | ||
| Pressure | | Pressure | ||
| mTorr, | | 4 mTorr, | ||
Strike: secs @ mTorr | Strike: secs @ mTorr | ||
|- | |- | ||
| Power | | Power | ||
| W Coil Power, W Platen Power | | 450 W Coil Power, 100 W Platen Power | ||
|- | |- | ||
|Platen temperature | |Platen temperature | ||
| | | 10°C | ||
|- | |- | ||