Jump to content

Specific Process Knowledge/Lithography/CSAR: Difference between revisions

Tigre (talk | contribs)
No edit summary
Tigre (talk | contribs)
Line 51: Line 51:


|-
|-
|-style="background:WhiteSmoke; color:black; text-align:center"
|-style="background:White; color:black; text-align:center"
!colspan="4"|Pretreatment
!colspan="4"|Pretreatment
|-
|-
Line 64: Line 64:


|-
|-
|-style="background:WhiteSmoke; color:black; text-align:center"
|-style="background:White; color:black; text-align:center"
!colspan="4"|Spin Coat
!colspan="4"|Spin Coat
|-
|-
Line 80: Line 80:


|-
|-
|-style="background:WhiteSmoke; color:black; text-align:center"
|-style="background:White; color:black; text-align:center"
!colspan="4"|Characterization
!colspan="4"|Characterization
|-
|-
Line 92: Line 92:


|-
|-
|-style="background:WhiteSmoke; color:black; text-align:center"
|-style="background:White; color:black; text-align:center"
!colspan="4"|E-beam Exposure
!colspan="4"|E-beam Exposure
|-
|-
Line 106: Line 106:


|-
|-
|-style="background:WhiteSmoke; color:black; text-align:center"
|-style="background:White; color:black; text-align:center"
!colspan="4"|Development
!colspan="4"|Development
|-
|-
Line 120: Line 120:


|-
|-
|-style="background:WhiteSmoke; color:black; text-align:center"
|-style="background:White; color:black; text-align:center"
!colspan="4"|Characterization
!colspan="4"|Characterization
|-
|-