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Specific Process Knowledge/Lithography/CSAR: Difference between revisions

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== Etch Tests ==
== Etch Tests ==


The tests presented here are prelimenary results and this page will be updated regularly. I post this as the interest in etch resistance of CSAR is increasing; if you have wafers or chips you would like to have tested, please send me an [[mailto:tigre@danchip.dtu.dk email]].
If you have wafers or chips with CSAR you would like to have tested, please send me an [[mailto:tigre@danchip.dtu.dk email]].


=== Chlorine versus flourine-based etches ===
=== Chlorine versus flourine-based etches ===
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/CSAR"