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Specific Process Knowledge/Lithography/CSAR: Difference between revisions

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DCH-Employees-701
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! rowspan="13" align="center"| Recipe
! rowspan="13" align="center"  width ="70"| Recipe
| rowspan="4"  width ="50"| Deposition step
| rowspan="4"  width ="50"| Deposition step
|Duration
|Duration
|2.5 s
| width ="100" |2.5 s
|rowspan="16" width="20%" | Profiles of lines exposed at 300 µC/cm2, etched 6:00 minutes with recipe 'NBoost01'
|rowspan="16" width="20%" | Profiles of lines exposed at 300 µC/cm2, etched 6:00 minutes with recipe 'NBoost01'
  [[File:tigre 6.17 -15% 3a_ 11.png|200px]] [[File:tigre 6.17 3a_ 08.png|200px]]
  [[File:tigre 6.17 -15% 3a_ 11.png|300px]] [[File:tigre 6.17 3a_ 08.png|300px]]
  [[File:tigre 6.17 3a_ 20.png|200px]] [[File:tigre 6.17 3a_ 21.png|200px]]
  [[File:tigre 6.17 3a_ 20.png|300px]] [[File:tigre 6.17 3a_ 21.png|300px]]
  [[File:tigre 6.17 3a_ 22.png|200px]]
  [[File:tigre 6.17 3a_ 22.png|300px]]
    
    
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