Specific Process Knowledge/Etch/III-V ICP: Difference between revisions
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|style="background:LightGrey; color:black"|Chiller temperature | |style="background:LightGrey; color:black"|Chiller temperature | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* Range | * Range 20-180 degrees | ||
|- | |- | ||
|style="background:LightGrey; color:black"|Gas flows | |style="background:LightGrey; color:black"|Gas flows | ||
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== Additional information == | == Additional information == | ||