Specific Process Knowledge/Lithography/CSAR: Difference between revisions
| Line 784: | Line 784: | ||
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| Power | | Power | ||
| W Coil Power, | | W Coil Power, W Platen Power | ||
|- | |- | ||
|Platen temperature | |Platen temperature | ||
| Line 784: | Line 784: | ||
|- | |- | ||
| Power | | Power | ||
| W Coil Power, | | W Coil Power, W Platen Power | ||
|- | |- | ||
|Platen temperature | |Platen temperature | ||