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Specific Process Knowledge/Lithography/CSAR: Difference between revisions

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==== Continous Etches ====
==== Continous Etches ====


[[File:617817 HD-4_11.tif|300px]]
[[File:617817 HD-4_18.png|400px]]


{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;" style="width: 60%;"
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;" style="width: 60%;"
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| Gasses
| Gasses
| C<sub>4</sub>F<sub>8</sub> 75 sccm, SF<sub>6</sub> 38 sccm
| C<sub>4</sub>F<sub>8</sub> 75 sccm, SF<sub>6</sub> 38 sccm
|rowspan="7" |  [[File:617817 HD-4_14.tif|300px]] [[File:617817 HD-4_16.tif|300px]] [[File:617817 HD-4_18.tif|300px]]
|rowspan="7" |  [[File:617817 HD-4_18.png|400px]] [[File:617817 HD-4_11.png|400px]] [[File:617817 HD-4_14.png|400px]] [[File:617817 HD-4_16.png|400px]]
|-
|-
| Pressure
| Pressure
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