Specific Process Knowledge/Lithography/CSAR: Difference between revisions
| Line 410: | Line 410: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|Sputter Coat | |Sputter Coat | ||
|Cressington 208HR, DTU CEN | |Cressington 208HR, DTU CEN, please contact [mailto:ramona.mateiu@cen.dtu.dk Ramona Valentina Mateiu] for information | ||
|3-5 nm Pt, sputtering, (29-08-2014 TIGRE) | |||
|3-5 nm Pt, sputtering (09-07-2014 TIGRE) | |3-5 nm Pt, sputtering (09-07-2014 TIGRE) | ||
|3-5 nm Pt, sputtering (22-05-2014 TIGRE) | |3-5 nm Pt, sputtering (22-05-2014 TIGRE) | ||