Specific Process Knowledge/Lithography/CSAR: Difference between revisions
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{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;" style="width: 60%;" | {|border="1" cellspacing="0" cellpadding="3" style="text-align:left;" style="width: 60%;" | ||
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|+style="background:Black; color:White" colspan="4"|'''Etch Tests of CSAR, DRIE PEGASUS, A-1''' | |+style="background:Black; color:White" colspan="4"|'''Etch Tests of CSAR, recipe 'nano1.42', DRIE PEGASUS, A-1''' | ||
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!rowspan="2"|Sample | !rowspan="2"|Sample | ||
!colspan="1"|Etch rate nm/min | |||
!colspan=" | |||
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|CSAR (Ellipsometer) | |CSAR (Ellipsometer) | ||
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