Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/original: Difference between revisions

Revision as of 13:27, 17 January 2017

**Process runs**
Date	Substrate Information				Process Information				SEM Images
Date	Wafer info	Mask	Material/ Exposed area	Tool / Operator	Conditioning	Recipe	Wafer ID	Comments	SEM Images
20/11-2014	4" Wafer with AZ resist	Travka50 pattern	Si / 50+ %	Pegasus/jmli	10 minute TDESC clean	danchip/jml/showerhead/prD, 110 cycles or 8:04 minutes	S004584	Old showerhead
1/12-2014	1/4 6" Wafer with 210 nm oxide and 1800 nm polysilicon crystalbonded on carrier	standard stepper mask (50 nm barc + 320 nm krf)	Si / 50+ %	Pegasus/jmli	10 minute TDESC clean + 45 sec barc etch	danchip/jml/showerhead/polySi etch DUV mask, 20 cycles or 3:02 minutes	S004675	New showerhead

Revision as of 17:27, 18 December 2014 view source Jmli (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 4,416 edits No edit summary ← Older edit		Revision as of 13:27, 17 January 2017 view source Jmli (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 4,416 edits No edit summary Newer edit →
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